Specification
Size, mm | 6.0 x 6.0 |
Thickness, mm | 0.5 |
Type | IIa |
Face orientation | (100) |
Edge orientation | (110) |
Crystallography |
Multi-sectorial |
Roughness, Ra | ≈ 5 nm |
Miscut | 90 +/-3° |
Parallelism | +/- 0.02 |
Lateral Tolerance, mm | +/- 0.05 |
Thickness Tolerance, mm | +/- 0.05 |
Edges | Polished |
Edge Features, mm | < 0.02 |
Laser |
Water-jet |
Boron Concentration, ppb |
≈ 50 |
Nitrogen Concentration, ppb | ≈ 10 |
Dislocations density, cm-2 | ≈ 102-5 |
Thermal conductivity, Wt/mK | ≈ 2 200 |
Absorption coefficient, cm-1 | 0,0045 |